MEC PowerETCH
HE-7002A
- HE-7002A is H2SO4-H2O2 type microetching agent that is available for etch down processes for high copper concentration capacity.
- This is an additive type agent that is available to adjust the etching rate based on etching asmount requirement and tool conditions.
- HE-7002A realize homogeneous surface treatment, and creates smooth copper surafce.
- It inhibits decomposition of hydrogen peroxide and realize stabilized etching rate.
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